Zygo ZMI 4104 High precision measuring equipment
Zygo ZMI 4104 is not only a high-precision measurement device, but also the core engine driving the process of industrial precision.
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Zygo ZMI 4104 High precision measuring equipment
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ZMI 4104 Technology Architecture and Innovative Breakthroughs
ZMI 4104 is the flagship displacement measurement solution in the Zygo ZMI™ series. Its design incorporates Zygo’s decades of technology accumulation in the field of laser interferometry, and its core features include:
Sub-nanometer resolution: Through patented cyclic error compensation (CEC) technology, it achieves a position resolution of 0.15 nm and an accuracy (σ) of 0.2 nm at maximum speed, breaking through the accuracy limits of traditional optical measurements.
Modular expansion capability: Support VME64x chassis architecture, single board can manage 4 measurement axes, the system can be expanded to a maximum of 64 axes, to meet the needs of multi-task parallel high complexity industrial scenarios.
Environmental adaptability: Minimum optical power as low as 0.07 µW with water-cooling technology (e.g., compatible 7714/7724 lasers) ensures stability under harsh conditions such as vibration and temperature change.
Intelligent integration: Support RS232, RS485 and other interfaces, combined with MetroPro and Mx software platform, real-time data monitoring and automation control seamlessly.
Zygo Corporation’s technological accumulation and industry position
Zygo Corporation, as a global benchmark enterprise in the field of precision measurement, has been promoting the expansion of optical metrology and ultra-precision manufacturing since its establishment in 1970 with the core values of “love for precision, dedication to quality, and integrity in customer relationship”. 2014, Zygo was merged into the AMETEK Group. AMETEK Group, Zygo has further strengthened its comprehensive service capabilities in the semiconductor, aerospace and medical fields by relying on the Group’s global resource network in electronic instruments and electromechanical equipment. The company owns more than 750 patents (some information shows that the number of patents reaches 1,000), and its product line covers laser interferometers, optical profilers, nano-sensors, etc., with the technical standard covering the full-dimensional measurement needs from sub-Egyptian ultra-smooth surfaces to complex industrial scenarios.
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Zygo ZMI 4104 is not only a high-precision measurement device, but also the core engine driving the process of industrial precision. Its technological innovation and ecological service model provide comprehensive solutions from micro to macro for semiconductor, optical manufacturing, scientific research and other fields. In the future, as Zygo continues to deepen its commitment to ultra-precision technology, the ZMI series is expected to become an infrastructure-level product in the era of intelligent manufacturing.
Deep expansion of application scenarios and industry empowerment
The application of ZMI 4104 has gone beyond the traditional metrology field to penetrate the whole chain of “precision manufacturing – process control – quality feedback”:
Semiconductor manufacturing: used for lithography platform positioning, wafer surface topography inspection, real-time feedback with an accuracy of 0.1 nm significantly reduces the defect rate.
Optical System Integration: Optimize the assembly accuracy of optical components through multi-axis simultaneous measurement in satellite-based imaging systems and infrared thermal imaging devices.
Scientific research and nanotechnology: Support rapid capture of 3D printing surface roughness, film thickness and other parameters (2 million data points per second), accelerating the development process of new materials.
Automated testing: Integration with Nikon semiconductor equipment, realizing dynamic error compensation in production line, improving yield rate and production efficiency.